Features
- Efficiency:99%,99.99%,99.999% @ 0.3um;
- Standard: EN1822,Class 11/13/14
- Maximum temperature 80°C:
- Maximum humidity: 100%RH
Applications
Used in hospitals,electronics factories,semiconductor manufacturing plants,stomic energy research centers,clean rooms,laminar flow equipment, clean workstations,and other clean places with high cleanliness requirements.